JPH0337238Y2 - - Google Patents
Info
- Publication number
- JPH0337238Y2 JPH0337238Y2 JP12037485U JP12037485U JPH0337238Y2 JP H0337238 Y2 JPH0337238 Y2 JP H0337238Y2 JP 12037485 U JP12037485 U JP 12037485U JP 12037485 U JP12037485 U JP 12037485U JP H0337238 Y2 JPH0337238 Y2 JP H0337238Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- circulation path
- condensable fluid
- substrate
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 13
- 230000032258 transport Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 230000005494 condensation Effects 0.000 claims 1
- 238000009833 condensation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000012071 phase Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12037485U JPH0337238Y2 (en]) | 1985-08-06 | 1985-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12037485U JPH0337238Y2 (en]) | 1985-08-06 | 1985-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6228449U JPS6228449U (en]) | 1987-02-20 |
| JPH0337238Y2 true JPH0337238Y2 (en]) | 1991-08-07 |
Family
ID=31008631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12037485U Expired JPH0337238Y2 (en]) | 1985-08-06 | 1985-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337238Y2 (en]) |
-
1985
- 1985-08-06 JP JP12037485U patent/JPH0337238Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6228449U (en]) | 1987-02-20 |
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